| 摘要 |
PROBLEM TO BE SOLVED: To perform uniform coating in the slit length direction of a die head with a die coater. SOLUTION: In the die head and die coater, a function of adjusting a slit thickness distribution is disposed on the die head of the die coater. By the function of adjusting the slit thickness distribution, the slit thickness distribution is adjusted and, as a result, the adjustment of the delivery distribution permits the uniform coating in the slit length direction of the die head with the die coater. The function of adjusting the slit thickness distribution is realized by using piezoelectric material. COPYRIGHT: (C)2004,JPO
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