| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thin film solar cell manufacturing process capable of eliminating the generation of flashes in openings of predetermined grooves when the grooves are formed on backside electrodes between adjacent cells. <P>SOLUTION: When transparent electrodes 11a, 11b, and 11c, semiconductor films 12a, 12b, and 12c and the backside electrodes 13 are laminated on a transparent substrate 10 in this order and the grooves 13d for separating the adjacent cells are formed on backside electrodes 13 thus made, the semiconductor films 12a, 12b, and 12c and the backside electrodes 13 are simultaneously removed by moving relatively the solar cells in the manufacturing process and laser beams LB of a 50ns or less in pulse width irradiated from the transparent substrate side and then the grooves 13d are formed. <P>COPYRIGHT: (C)2004,JPO</p> |
