| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thermooptic phase shifter which is easily fabricated, excellent in optical characteristics, strength, stability and reliability and operates with low power consumption and a method for manufacturing the same. <P>SOLUTION: A sacrificial layer 2 is disposed on a substrate 1 and a cladding layer 13 is disposed on the sacrificial layer 2. The cladding layer 13 is constructed with a lower side cladding layer 3 and an upper side cladding layer 5. A core 4 extending in a direction parallel to a surface of the substrate 1 is disposed on the lower side cladding layer 3 and the upper side cladding layer 5 is disposed so as to cover the core 4. An optical waveguide 14 is formed of the core 4 and the cladding layer 13 surrounding the core 4. Also grooves 8 are formed on a part of the optical waveguide 14 in a longitudinal direction so as to tuck the optical waveguide 14. Furthermore, a gap 15 with 4μm or more width is formed between the optical waveguide 14 and the substrate 1 by selectively removing the sacrifice layer 2 with etching. <P>COPYRIGHT: (C)2004,JPO</p> |
