发明名称 |
Stamper, lithographic method of using the stamper and method of forming a structure by a lithographic pattern |
摘要 |
A stamper includes a substrate and a plurality of protrusions of different heights formed on one of he surfaces of the substrate, the protrusions of larger height having a stack structure formed of at least two layers of at lease two types of materials, thereby transferring a plurality of patterns at the same time.
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申请公布号 |
US2004023162(A1) |
申请公布日期 |
2004.02.05 |
申请号 |
US20030628275 |
申请日期 |
2003.07.29 |
申请人 |
HASEGAWA MITSURU;MIYAUCHI AKIHIRO |
发明人 |
HASEGAWA MITSURU;MIYAUCHI AKIHIRO |
分类号 |
H01L21/027;B29C33/42;B29C43/36;G03F7/00;(IPC1-7):G03F7/00 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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