THIN FILM SUPPORTING SUBSTRATE USED IN FILTER FOR HYDROGEN PRODUCTION AND METHOD FOR MANUFACTURING FILTER FOR HYDROGEN PRODUCTION

摘要

A filter for a hydrogen production, which is used in a reformer of a fuel cell and enables stable production of a hydrogen gas of a high purity, is manufactured by attaching a metal plate onto one side of a conductive base having a plurality of through holes using a magnet in a through hole closing step; filling up the through holes by forming a copper plating layer on the conductive base and portions of the metal plate which are exposed in the through holes from the other side of the conductive base on which the metal plate is not attached in a copper plating step; forming a Pd alloy film by plating on the side of the conductive base from which the metal plate has been removed in a film-forming step; and removing the copper plating layer by a selective etching in a removing step.