| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermally driven micromirror capable of realizing the miniaturization of a mirror surface by preventing the rotary shaft center of the mirror surface from being deviated and preventing the movement of the reflecting position of light on the mirror surface, and an electronic apparatus having the thermally driven micromirror. SOLUTION: In the thermally driven micromirror 10 which is equipped with the mirror surface 20 and a supporting arm structure part 14 supporting the surface 20 and having laminated structure, and where an angleθis given to the surface 20 by bending the structure part 14 from the difference of a thermal expansion coefficient in the laminated structure by applying electricity to the structure part 14 so as to generate heat, the structure part 14 is formed between the surface 20 and an electrode part 30 for applying the electricity, and the shafts L1 and L2 of the structure part 14 in a longitudinal direction are perpendicular to the center axis CL of the surface 20, and the center positions 81 and 82 of the structure part 14 in the longitudinal direction are positioned nearly on the center axis CL of the surface 20. COPYRIGHT: (C)2004,JPO
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