| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleanliness evaluation device capable of measuring and evaluating cleanliness of a clean space such as a clean room, a clean chamber or a clean box, highly accurately in a short time. SOLUTION: This cleanliness evaluation device M is equipped with a nebulizer W4 for forming atomized waterdrops by atomizing extrapure water W, an absorption tube H1 for allowing the atomized waterdrops to absorb a nonvolatile component in a sample gas S by executing gas-liquid contact between the atomized waterdrops formed by the nebulizer W4 and the sample gas S which is a measuring object, an evaporator H2 for drying the sample gas S whose water-soluble component is absorbed into the atomized waterdrops in the absorption tube H1 and depositing and solidifying the nonvolatile component in the sample gas S to form particles, a condensed nucleus counter (CNC) H4 for counting the number of particles formed in the evaporator H2, and a vacuum pump H5 and a three-way valve SV or the like for generating an air flow flowing successively to each part. COPYRIGHT: (C)2004,JPO
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