| 摘要 |
PROBLEM TO BE SOLVED: To provide a detection method or the like of short-circuiting between electrodes that can automatically detect the short-circuiting between adjacent electrodes in a plurality of strip of electrodes being arranged in parallel and closely for repairing. SOLUTION: When the short-circuiting between two adjacent electrodes selected from the plurality of electrodes being arranged in parallel is detected, a probe is applied to each of the two adjacent electrodes from a side, the resistance between the electrodes is measured, and the presence or absence of the short-circuiting between the electrodes is determined according to the resistance. The position of the short-circuiting formed between the electrodes is obtained, the inside of a specific region 303 with the position of the short-circuiting as a reference is set to be an observation region, and the image of the inside of the observation region is imaged in an enlarged state. A specific image processing is made to the imaged image to specify the short-circuited point between the electrodes, thus quickly and reliably detecting short-circuiting defects and reducing repairing time. COPYRIGHT: (C)2004,JPO
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