| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing apparatus in which uniform reaction and precipitation and efficient and stable operation can be carried out by dividing a reaction furnace into a plurality of sections and independently controlling the temperature in each divided section as programmable, as a manufacturing apparatus for high purity silicon by a vapor phase zinc reduction method, and to provide a manufacturing method. SOLUTION: The reaction furnace is divided into a plurality of sections, and the temperature in each section is varied as the reaction conditions in the furnace. Thus, the reduction reaction and precipitation can be stably carried out for a long period of time to improve the manufacture efficiency. COPYRIGHT: (C)2004,JPO
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