| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a multi-layer ceramic substrate by which a cavity with high positional and dimensional precision is formed. <P>SOLUTION: First, a ceramic green sheet 101 and a roughened surface sheet 102 are laminated and contact-bonded by arranging one of the main sides of the ceramic green sheet 101 face to face with the roughened surface of the roughened surface sheet 102 having the roughened surface formed on one of the main surfaces and also the roughened surface sheet 102 on the outermost face of a composite laminated product 109. Then a first ceramic laminated product 104 is manufactured by forming through holes in the obtained laminated product and the composite laminated product 109 with a cavity 108 is manufactured by laminating the first ceramic laminated product 104 on a second ceramic laminated product 107 comprising a ceramic green sheet 105. Finally, the multi-layer ceramic substrate is obtained by baking the composite laminated product 109. <P>COPYRIGHT: (C)2004,JPO |
