| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of fabricating to readily separate an electroformed orifice plate from a substrate base. SOLUTION: A system and a method are provided for fabricating the orifice plate 14 for use in an inkjet printing system. Initially, the substrate base 16 is provided, and a controlled-release layer 18 is applied to the surface of the substrate base 16. A conductive metal layer 20 is adherently deposited on the controlled-release layer 18. At least one dielectric peg 22 is formed on a portion of the conductive metal layer 20, and a nozzle layer 24 is applied on the conductive metal layer 20 to partially cover the dielectric peg 22. Photolithography is used to define a trench that covers the nozzles prior to formation of a second reinforcing layer. The controlled-release layer 18 is removed to separate the orifice plate from the substrate base 16. The conductive metal layer 20 is selectively etched from the nozzle layer 24 to produce a completed multi-layer orifice plate. COPYRIGHT: (C)2004,JPO |
