METHOD FOR MANUFACTURING THIN-FILM MULTILAYER DEVICE

摘要

PROBLEM TO BE SOLVED: To enable a continuous process for multilayer formation without interrupting a vacuum process. SOLUTION: A base substrate 11 is a 125μm-thick polyimide substrate, and oil 12 is Fomblin oil. The oil 12 is heated in a vacuum in a heater-installed tank for vaporization, and vapor is discharged out of a fine nozzle and applied to the base substrate 11. An aluminum conductor 13 is then formed by sputtering aluminum, and is converted into a capacitor electrode. Next, the aluminum conductor 13 for electrode formation is oxidized in plasma for conversion into an aluminum oxide for the formation of a dielectric layer 14. COPYRIGHT: (C)2004,JPO