| 摘要 |
PROBLEM TO BE SOLVED: To provide an integrated sensor device having a moisture sensor and a gas sensor whose structure of a body can be miniaturized. SOLUTION: The sensor device comprises a gas sensor section for detecting gas concentration due to a change in the resistance of a gas-sensitive film 16 that is heated by a heater 12; and a moisture sensing section for detecting moisture due to a change in the resistance of the heated heater 12 itself. In the sensor device, both the sensors are integrated on the same semiconductor substrate 9 by sharing the heater 12. In this manner, in the integrated sensor device 1, the structure of the body of a sensor chip 4 having two different sensor functions can be miniaturized by sharing the heaters 12. COPYRIGHT: (C)2004,JPO
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