METHOD FOR MANUFACTURING POROUS COMPOSITE STRUCTURE AND POROUS FINE PARTICLES USED IN THE MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a structure or a film having open micropores on a substrate. SOLUTION: Ultrafine particles of a brittle material having an average particle diameter of <0.1μm are fired and porous fine particles are formed by partly joining the ultrafine particles together by the firing. The porous fine particles are dispersed in gas to prepare an aerosol and the aerosol is blown on a substrate to allow the porous fine particles to colloid, whereby the porous fine particles are joined together and deposited on the substrate to form the objective porous structure. COPYRIGHT: (C)2004,JPO