| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a small-sized measuring element of a gas flow rate and a temperature having high temperature detection accuracy of air by a gas temperature detection part and high flow rate detection accuracy. <P>SOLUTION: This element has a first wiring part 22 where gas temperature detection wiring 21 is disposed along a flow rate detection part 4 adjacently thereto with the approximately equal length to the flow rate detection part 4, and a second wiring part 23 disposed from the first wiring part 22 to the end of a comb tooth-shaped pattern of the gas temperature detection part 5. The element is formed so that electrode terminals 6e, 6f are connected to the gas temperature detection part 5. A high-heat resistance part 24 having a heightened thermal resistance by reducing the width of a part of the second wiring part 23 is constituted. <P>COPYRIGHT: (C)2004,JPO</p> |
