| 摘要 |
PROBLEM TO BE SOLVED: To provide a planar optical waveguide circuit element of an excellent manufacture yield, its manufacturing method, and a planar optical waveguide circuit element module whose handling is facilitated. SOLUTION: The manufacturing method comprises a process of sticking a substrate where a planar optical waveguide circuit is formed to a substrate supporting sheet; a process of forming a cutting groove on the stuck substrate and cutting off the planar optical waveguide circuit element; a process of peeling the cut-off planar optical waveguide circuit element from the substrate supporting sheet; and a process of forming a shallow groove for a shelf part wider than the cutting groove and shallower than the thickness of the substrate on at least a part of a position to form the cutting groove before one of the processes. COPYRIGHT: (C)2004,JPO |
