ELECTROSTATIC DRIVE TYPE MIRROR ARRANGEMENT

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic drive type mirror arrangement capable of stable and highly reliable operations by imparting self-holding characteristics to an electrostatic drive mirror and substantially reducing the number of driving voltage sources. SOLUTION: The electrostatic drive type mirror arrangement comprises: the electrostatic drive mirror 21 variably operated by electrostatic drive; an electrostatic drive mirror driving part provided with a mirror drive electrode 22 for driving the electrostatic drive mirror and signal wiring 24 for applying a driving voltage to the mirror drive electrode and constituted on the same semiconductor substrate 20; a variable voltage source 25 for supplying a voltage to the electrostatic mirror driving part from the outside; a drive switch 26 for controlling and driving the applying voltage to the electrostatic mirror driving part; a holding capacitor 27 for holding the applying voltage; and a control part 28 for controlling the drive switch and the variable voltage source. COPYRIGHT: (C)2004,JPO