| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical coupler capable of realizing the reduction in the optical coupling loss, miniaturization and the reduction in cost, and its manufacture method. SOLUTION: An optical waveguide 30 constituted of a silicon oxide film 2 being a lower clad layer, a core 3a consisting of silicon and air is provided on one surface side of a supporting substrate 1 consisting of a silicon substrate, and a positioning groove 5 consisting of a V-groove, whose cross section is V-shaped, arranged separately from the optical waveguide 30 and positioning an optical fiber 20 optically coupled with the optical waveguide 30. A foundation pattern 6 consisting of a cyclic rugged pattern is formed between the groove 5 and the optical waveguide 30 on the one surface side of the substrate 1, and an optical coupling device 40 consisting of a refractive index cyclic structural body for optically coupling the optical fiber 20 and the optical waveguide 30 is formed in a self-alignment manner on the pattern 6. COPYRIGHT: (C)2004,JPO |
