发明名称 NONVOLATILE MEMORY AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To release a carrier at high speed or low voltage or release the carrier with a small remaining quantity, the carrier being trapped in a discrete carrier trap site in the gate insulating film of a nonvolatile memory which comprises a bottom insulating film, an intermediate film, and a top insulating film. SOLUTION: When the carrier is an electron, an electronic structure is provided in which the bottom insulating film has one side making contact with the intermediate film with larger electron affinity than the other side making contact with a first semiconductor area, so that an electron is readily released from the discrete trap site. When the carrier is a positive hole, an electronic structure is provided in which regarding a valence band top, the bottom insulating film has one side making contact with the intermediate film with higher energy than the other side making contact with the first semiconductor area, so that the positive hole is readily released from the discrete carrier trap site. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004040064(A) 申请公布日期 2004.02.05
申请号 JP20020226715 申请日期 2002.07.01
申请人 HAYASHI YUTAKA 发明人 HAYASHI YUTAKA
分类号 H01L21/314;H01L21/316;H01L21/318;H01L21/8247;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L21/824 主分类号 H01L21/314
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