| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that there is possibility of affecting an influence of an application of a force to an optical element due to a contact of a cooling device with the element for causing a mirror to be deformed or transmitting a vibration of the device to the mirror to an exposure performance, though a method for cooling the element by bringing the device into contact with the element is considered. SOLUTION: A mirror cooling device includes an electronic cooling element for cooling the mirror, a spring-like member disposed between the mirror and the cooling element, a heat transfer element for transferring a heat discharged from the cooling element, and a cooling mechanism for cooling the heat transfer element. COPYRIGHT: (C)2004,JPO
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