DESIGN PROGRAM AND SEMICONDUCTOR DESIGN SYSTEM OF THE DESIGN METHOD OF SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To design a semiconductor device by taking into consideration capacity fluctuation between wiring patterns due to the insertion of a dummy pattern. SOLUTION: An information accepting part 1a accepts dummy rule information 1aa related with the rule of a dummy pattern and process information 1ab related with the wiring structure of a wiring pattern. A capacity calculating part 1b calculates a capacity value in each wiring interval between the wiring patterns when the dummy pattern based on the rule of the dummy rule information 1aa is inserted between the wiring patterns based on the wiring structure of the process information 1ab. A wiring pattern capacity calculating part 1c refers to the capacity value calculated by the capacity calculating part 1b, and calculates the capacity value between the wiring patterns of the semiconductor device to be designed and manufactured which is stored in a layout DB 1d as layout data. Thus, it is possible to design the semiconductor device by taking into consideration the capacity fluctuation between the wiring patterns due to the insertion of the dummy pattern. COPYRIGHT: (C)2004,JPO