发明名称 |
System and method for laser beam expansion without expanding spatial coherence |
摘要 |
An system and method that expand emitted light from a laser beam without changing spatial coherence or producing speckle. The system includes a laser source and an optical projection system having a multiplexing device. The multiplexing device expands light emitted by laser source into plural beams having light intensity about equal to each other without changing spatial coherence. The multiplexing device has a plurality of spatially separated beam splitters positioned parallel to and on a same side of a mirror. The system further includes an illuminating optical system that focuses each of the plural beams and a projection optical system that projects an image of a mask illuminated with light output from illuminating optical system onto a substrate.
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申请公布号 |
US2004021842(A1) |
申请公布日期 |
2004.02.05 |
申请号 |
US20020208046 |
申请日期 |
2002.07.31 |
申请人 |
ASML US, INC. |
发明人 |
KREMER ALEXANDER;DRAZKIEWICZ STANLEY W. |
分类号 |
H01S3/10;G02B27/09;G02B27/14;G02B27/48;G03F7/20;H01L21/027;(IPC1-7):G03B27/54 |
主分类号 |
H01S3/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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