发明名称 METAL LAMINATE AND METHOD OF ETCHING THE SAME
摘要 <p>A metal laminate having a layer comprising a metal layer and, superimposed thereon, an insulating layer, the insulating layer subjected to etching, wherein at the surface of metal layer on the side in contact with the insulating layer, when the concentrations of main metal element and oxygen element constituting the metal layer are measured over time in the direction from the surface of metal layer toward the internal part of metal layer according to AES (Auger Electron Spectroscopy), the value of thickness of metal oxide film at the surface of metal layer, as determined at the time that the atomic concentrations of metal element and oxygen element become equal to each other, is in the range of 0 Å to less than 50 Å. The etching time can be calculated, and there can be provided a flexure for use in a suspension of hard disc drive of high productivity.</p>
申请公布号 WO2004011247(A1) 申请公布日期 2004.02.05
申请号 WO2003JP09509 申请日期 2003.07.28
申请人 MITSUI CHEMICALS, INC.;HIROTA, KOJI;KOBAYASHI, MASANAO;MORI, MINEHIRO;NAKAZAWA, NAOKI 发明人 HIROTA, KOJI;KOBAYASHI, MASANAO;MORI, MINEHIRO;NAKAZAWA, NAOKI
分类号 G11B5/48;H05K1/03;H05K1/05;H05K3/00;H05K3/38;(IPC1-7):B32B15/08;G11B21/21 主分类号 G11B5/48
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