ULTRACLEAN FLUOROELASTOMER SUITABLE FOR USE IN THE MANUFACTURING OF ELECTRONIC COMPONENTS

摘要

A curable fluoroelastomer composition for preparing a perfluoroelastomer. The composition includes; (1) a perfluoropolymer having one or more cure-sites selected from a halogen capable of participating in peroxide cure reaction and/or nitrile groups; (2) an organic peroxide and/or a compound capable of effecting curing of the perfluoropolymer through said nitrile groups; and (3) optionally a polyunsaturated coagent. The perfluoropolymer in the composition is essentially free of ionic end groups and the total amount of metal cations in the composition is not more than 10µg/g perfluoropolymer. The perfluoroelastomers may be obtained from curing the composition in a sufficiently low amount of metal cations so as to make the fluoroelastomer suitable for use in the semi-conductor industry.