| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an analytical and inspection method having highest possible throughput when implemented in a manufacturing process and for performing efficient analysis in evaluating, through the use of an X-ray reflectance method, the film quality of a film made of organic matter formed on a substrate (abbreviated as an organic film below) such as an organic film (such as a biochip) in an organic device arranged in a matrix shape on a substrate. <P>SOLUTION: The method for inspecting the film quality of the organic device in a manufacturing process of the organic device in which the organic film is formed on the substrate comprises a sample holding base for arranging the organic device; a mechanism for moving the sample holding base; an X-ray source which rotates and moves around the location of measurement over the sample holding base; and an X-ray detector for detecting X-rays reflected at a specific angle at the location of measurement over the sample holding base. The method for inspecting the surface condition of the organic device analyses the organic film in the manufacturing process of the organic device through the use of the mechanism. <P>COPYRIGHT: (C)2004,JPO</p> |
