| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser plasma X-ray generating system capable of promptly recovering a cryo-target layer on a drum surface maintained at very low temperature with liquid nitrogen. SOLUTION: At the lower end of a shaft 121, a drum 122 is fixed, and the drum 122 is arranged movably in the rotational direction and the shaft direction inside a cryo-cover 106. A liquid nitrogen supply pipe 131 is inserted in the shaft 121 and a pipe 144 for target gas supply is connected with the cryo-cover 106. A jacket 171 is arranged surrounding the cryo-cover 106 and a heat exchanger is formed by arranging pipes 185 around the pipe 144. Then vapor gas of liquid nitrogen is taken out of a gap S in between the shaft 121 and the liquid nitrogen supply pipe 131, introduced in between the pipe 144 and the pipe 185, and to the jacket inside 171, cools the target gas and improves the adhesion efficeincy of the target member. COPYRIGHT: (C)2004,JPO |
