LINEAR MOTOR, STAGE ARRANGEMENT, AND ALIGNER

摘要

PROBLEM TO BE SOLVED: To evenly cool a coil body by suppressing tube deformation even if the length of a movable member is long. SOLUTION: Inside a tube body 18a, a coil body 19 is internally mounted and a flow path 13 of a temperature adjusting medium is formed. A constraint member 18e is engaged with the outer periphery of the tube body 18a to constrain the deformation of the tube body. The constraint member 18e is disposed at a position different from both ends of the axis. COPYRIGHT: (C)2004,JPO