| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature control means of a detector which does not contaminate a surface of a measured object, regularly maintains sensitivity of the detector and allows measuring an optical characteristic in a vacuum ultraviolet wavelength domain. SOLUTION: The temperature control means of the detector measures the optical characteristic under a measurement environment in a vacuum state or a measurement environment filled with a gas hardly absorbing radiation in the vacuum ultraviolet wavelength domain, has a housing for containing and isolating the detector and an element required for cooling or regulating a temperature of the detector from the measurement environment and a conduction part for bringing an interior of the housing and an external air environment into conduction and controls the element required for cooling or regulating the temperature of the detector from the external air environment side through the conduction part. COPYRIGHT: (C)2004,JPO
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