| 摘要 |
PROBLEM TO BE SOLVED: To manufacture inexpensively a highly-reliable humidity sensor with a high fraction nondefective by a method by a new manufacturing process having the reduced number of processes having a high fraction defective in manufacture. SOLUTION: In order to realize the manufacturing process wherein an upper electrode formation process having a high fraction defective is removed, counter electrodes having a projection part respectively are juxtaposed oppositely on the same plane and formed simultaneously by a deposition method, a printed wiring method or an electroplating method, and then a process for forming a humidity-sensitive film is performed, and the humidity sensor is completed. Hereby, a second-time electrode deposition process becomes unnecessary. COPYRIGHT: (C)2004,JPO
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