发明名称 |
CHIP SCALE PACKAGE OF MEMS DEVICE AND MANUFACTURING METHOD THEREOF |
摘要 |
PURPOSE: A chip scale package of an MEMS(Micro-Electro-Mechanical-System) device and a manufacturing method thereof are provided to be capable of easily carrying out a mounting process at the minimum surface area of an outer circuit board. CONSTITUTION: A chip scale package of an MEMS device is provided with a lower substrate(500) having a plurality of via holes, an upper substrate(400), a plurality of conductive material parts(540) formed at the via holes, and a plurality of MEMS devices(550) loaded at the predetermined portions of the lower substrate. The chip scale package further includes a connection part for electrically connecting the conductive material part with the MEMS device and an adhesive part(430) for attaching the upper substrate to the lower substrate.
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申请公布号 |
KR20040010923(A) |
申请公布日期 |
2004.02.05 |
申请号 |
KR20020043962 |
申请日期 |
2002.07.25 |
申请人 |
KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
JU, BYEONG GWON;LEE, DEOK JUNG;LEE, YUN HUI;PARK, HEUNG U;PARK, YUN GWON |
分类号 |
H01L23/28;(IPC1-7):H01L23/28 |
主分类号 |
H01L23/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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