METHOD FOR ANALYZING COMPOSITION OF ORGANIC FILM BY TIME-OF-FLIGHT SECONDARY ION MASS SPECTROMETRY

摘要

PROBLEM TO BE SOLVED: To provide a method having high accuracy in determination and satisfactory reproducibility for analyzing the composition of an organic film in an organic device (such as a biochip) in which film-like organic substances are arranged on a substrate in a matrix shape by a time-of-flight secondary ion mass spectrometry (TOF-SIMS).

SOLUTION: The same measuring conditions of a TOF-SIMS apparatus are set to an object to be measured and reference matter located outside. The secondary ion mass spectrums of them are each measured. By adopting a method for correcting detector efficiency from the relation between mass numbers and secondary ion intensities based on the secondary ion mass spectrum measured on the reference matter, it is possible to exclude the effects of absolute sensitivity variations associated with changes with the passage of time in a detecting system and achieve high accuracy in determination and high reproducibility.

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