| 摘要 |
PROBLEM TO BE SOLVED: To provide a device by which superfine machining applying a cantilever using a medium except electro-magnetic waves is carried out, and also to provide a method by which the cantilever provided with a micro-opening of a superfine bore is manufactured easily. SOLUTION: A micro-machining device 1 is provided which is characterized in that a fluid 4 is made to flow out through the micro-opening 15 from the inside of a projection 13 in the device provided with a cantilever 3a having a cantilever portion 12 supported at one end, the projection 13 projectingly provided from the cantilever portion 12 and the micro-opening 15 formed penetratingly in the projection 13 in its projecting direction. COPYRIGHT: (C)2004,JPO
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