| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaner of high dust collection efficiency in a semiconductor resin sealing apparatus. SOLUTION: In the cleaner, a rotating brush in which a rotating shaft is parallel to a flat surface to be cleaned is disposed in a dust collection hood of a dust collection head and also a lower end of the dust collection hood is located in close vicinity to the flat surface to be cleaned or in contact therewith. Further, the rotating brush is disposed aside in the dust collection hood so that one inside wall among facing inside walls of the dust collection hood which face each other at both sides of the rotating shaft of the rotating brush, is arranged near the rotating brush and another inside wall is arranged so as to form a dust collection path between the rotating brush and itself. COPYRIGHT: (C)2004,JPO
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