A METHOD FOR DETERMINING A CRITICAL SIZE OF AN INCLUSION IN ALUMINUM OR ALUMINUM ALLOY SPUTTERING TARGET,申请号KR20037013047-传众专利搜索

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发明名称	A METHOD FOR DETERMINING A CRITICAL SIZE OF AN INCLUSION IN ALUMINUM OR ALUMINUM ALLOY SPUTTERING TARGET
摘要
申请公布号	KR20040011495(A)	申请公布日期	2004.02.05
申请号	KR20037013047	申请日期	2003.10.04
申请人		发明人
分类号	C23C14/34	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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