发明名称 SPHERICAL PART MEASURING METHOD AND SPHERICAL PART MEASURING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a spherical part measuring method and a spherical part measuring device capable of easily obtaining the radius of curvature of a spherical part. SOLUTION: The radius of curvature of a spherical inspection object 5 is obtained based on the distance between two condensing positions in condensing light emitted from a light source 11 at the top S of the inspection object 5 and in condensing it toward the center O of the inspection object 5. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004037191(A) 申请公布日期 2004.02.05
申请号 JP20020193315 申请日期 2002.07.02
申请人 NIKON CORP 发明人 AMAMIYA NOBORU
分类号 G01B11/08;(IPC1-7):G01B11/08 主分类号 G01B11/08
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