| 发明名称 |
High-peak-power laser device and application to the generation of light in the extreme ultraviolet |
| 摘要 |
This device comprises at least three pulsed lasers (2, 4, 6), in order to supply light pulses, and means (14) for directing these pulses substantially onto the same spot of a target (16) and substantially at the same time onto this spot. The lasers are pumped by diodes (40) operating continuously.
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| 申请公布号 |
US2004022295(A1) |
申请公布日期 |
2004.02.05 |
| 申请号 |
US20030381015 |
申请日期 |
2003.03.20 |
| 申请人 |
WEULERSSE JEAN-MAR;LE FLANCHEC VINCENT;GILBERT MICHEL |
发明人 |
WEULERSSE JEAN-MAR;LE FLANCHEC VINCENT;GILBERT MICHEL |
| 分类号 |
H01L21/027;G03F7/20;H01S3/00;H01S3/23;(IPC1-7):H01S3/30;H01S3/091;H01S3/094;H01S3/08 |
主分类号 |
H01L21/027 |
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