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发明名称
MICROELECTROMECHANICAL SYSTEM (MENS) DEVICE
摘要
申请公布号
EP1386347(A2)
申请公布日期
2004.02.04
申请号
EP20020724965
申请日期
2002.02.20
申请人
ROCKWELL AUTOMATION TECHNOLOGIES, INC.
发明人
ANNIS, JEFFREY, R.;DUMMERMUTH, ERNST, H.;HARRIS, RICHARD, D.;HERBERT, PATRICK, C.;KNIESER, MICHAEL, J.;KRETSCHMANN, ROBERT, J.;LARSSON, HENRIC;MORRIS, WINFRED, L.;YAO, JUN, J.
分类号
B81B7/02;B81B3/00;G01P15/13;G01R15/20;G01R17/08;G01R19/20;G05B19/07;H01H59/00;H03H9/46;(IPC1-7):B81B3/00
主分类号
B81B7/02
代理机构
代理人
主权项
地址
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