摘要 |
<p>A vertical-cavity surface-emitting laser (VCSEL) comprises a stacked structure including an active region disposed within a cavity having distributed Bragg reflectors (DBRs) at either end. One DBR comprises a first region comprising alternating layers of Al0.9Ga0.1As and Al0.1Ga0.9As, a second region comprising alternating layers of AlAs and Al0.1Ga0.9As and a third region comprising alternating layers of Al0.9Ga0.1As and Al0.1Ga0.9As. The second region also comprises aluminium oxide (AlxOy) confining layers which are coplanar with AlAs layers. The first region is closest to the active region and serves as a spacer region. <IMAGE></p> |