Laser beam machining apparatus

摘要

A laser beam machining apparatus capable of highly accurate machining at a high speed. A parallel link mechanism 2 including a plurality of links 2a-2d is fixed to a frame 1 and a workpiece holder 3 having moving means is provided thereunder. The links 2a-2d of the parallel link mechanism 2 connect a movable member 5 with a stationary member 4, and the movable member 5 is moved with respect to the stationary member 4 by the extending/retracting operation of the links 2a-2d. A laser head 6 serving as a machining head is attached to the movable member 5. A supply line 7 includes a laser transmitting optical fiber, pipes for supplying water, assist gas, etc., and an electrical signal line. A laser beam LB outputted from the laser head 6 performs machining on a workpiece W on the workpiece holder 3. The supply line passed through a through hole 8 formed inside link joint portions on the stationary member 4. Hollow motors 9a-9d for driving the links 2a-2d of the parallel link mechanism 2 are mounted on the stationary member 4.