| 发明名称 |
Device for moving components in vacuum apparatuses |
| 摘要 |
<p>A device for moving components inside vacuum units comprises a housing with an inner space with gas-tight connection to the vacuum unit and holding components which are magnetic or joined to magnets. A separated outer space contains magnets whose movement moves the inner components by non-contacting force.</p> |
| 申请公布号 |
EP1387473(A2) |
申请公布日期 |
2004.02.04 |
| 申请号 |
EP20030400035 |
申请日期 |
2003.06.10 |
| 申请人 |
LEIBNIZ-INSTITUT FUER FESTKOERPER- UND WERKSTOFFFORSCHUNG DRESDEN E.V. |
发明人 |
GOEDSCHE, THOMAS, DR.;LINDACKERS, DIRK, DR. |
| 分类号 |
B65G49/07;H01L21/68;H02K49/10;(IPC1-7):H02K49/10 |
主分类号 |
B65G49/07 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
