Processing system including processing tool and silicon work-piece in combination and method for carrying out fixed-abrasive grinding process on silicon work-piece

摘要

A processing tool is used to carry out a fixed-abrasive grinding process on a surface of a silicon work-piece. The processing tool includes abrasive grains made up silica grains. A primary average grain size of the silica grains is desirably 0.8 nm to 10 mum.