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发明名称
摘要
申请公布号	JP3494081(B2)	申请公布日期	2004.02.03
申请号	JP19990188165	申请日期	1999.07.01
申请人		发明人
分类号	H01L21/312;C09D183/04;(IPC1-7):H01L21/312	主分类号	H01L21/312
代理机构		代理人
主权项
地址

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