| 摘要 |
A cross-section is obtained in which a sample shape is clearly delineated by forming a covering layer of a material different from that of the sample surface on the sample surface, forming a protective layer on the covering layer forming a hole in the protective and covering layers and the sample surface to expose the cross-section, and tilting the sample and scanning the cross-section with a focused ion beam so as to obtain a microscopic image of the cross-section. By forming the covering layer of a material different from that of the sample surface, the shape of the sample can be clearly viewed in the obtained image.
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