Mass flow sensor utilizing a resistance bridge

摘要

A mass flow sensor to be mounted within a duct and measures the mass flow of a fluid stream moving through the duct. The sensor is an elongated thin quartz substrate having a plurality of platinum strips extending in a parallel relationship on the strip, with certain of the strips being resistors connected to an excitation voltage. The resistors form the legs of a Wheatstone bridge. The resistors are spaced a sufficient distance inwardly from the leading and trailing edges of the substrate to lie within the velocity recovery region so that the measured flow is the same as the actual upstream flow. The resistor strips extend at least half-way through the fluid stream to include a substantial part of the velocity profile of the stream. Certain of the resistors detect a change in temperature as the fluid stream moves across the substrate to provide an output signal from the Wheatstone bridge which is representative of the fluid flow. A heater is located in the midst of the resistor array to heat the air as it passes over the array.