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发明名称
PROCESS FOR FORMING A FRAGILE LAYER INSIDE OF A SINGLE CRYSTALLINE SUBSTRATE
摘要
申请公布号
AU2002329945(A1)
申请公布日期
2004.02.02
申请号
AU20020329945
申请日期
2002.08.31
申请人
USENKO, ALEXANDER
发明人
ALEXANDER USENKO
分类号
H01L21/265;H01L21/30;H01L21/762;(IPC1-7):H01L21/30;H01L21/46
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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