| 摘要 |
PURPOSE: An oven for semiconductor is provided to be capable of constantly conserving the gas introduced into a wafer and uniformly controlling temperature by installing a predetermined structure plate at a gas inflow port. CONSTITUTION: An oven for semiconductor, is provided with an oven body part(11), a wafer fixing plate(12) installed at the inner portion of the oven body part for loading a wafer(15), and a wafer rotation shaft(13) for supporting and rotating the wafer fixing plate. The oven for semiconductor further includes a gas inflow port(19) for flowing gas into the oven body part and a plate part(17) located between the gas inflow port and the wafer. Preferably, the wafer rotation shaft is capable of rotating the wafer as well as the wafer fixing plate.
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