APPARATUS AND METHOD FOR SENSING POSITION OF WAFER IN ROBOT ARM

摘要

PURPOSE: A method for sensing the position of a wafer in a robot arm is provided to prevent a wafer from being missed or damaged by installing a plurality of sensors in the robot arm so that the position of the wafer placed in the robot arm can be sensed. CONSTITUTION: The wafer is placed in the robot arm(30). Whether the wafer is horizontally placed in the robot arm is determined. After it is confirmed that the wafer is horizontally placed in the robot arm, the wafer is transferred. If it is confirmed that the wafer is not horizontally placed in the robot arm, the transfer of the wafer stops. An operator is informed that the transfer of the wafer stops, and the position of the wafer placed in the upper portion of the robot arm is adjusted.