MAGNETOHYDRODYNAMIC BARRIER EMBEDDED MICRO MIXER AND METHOD FOR MANUFACTURING THE SAME

摘要

PURPOSE: A magnetohydrodynamic barrier embedded micro mixer and a method for manufacturing the same are provided to achieve superior chaotic mixing by periodically creating and extinguishing a hyperbolic point based on a spiral flow formed in a micro channel. CONSTITUTION: At least one barrier(161) is aligned on an upper channel plate(162) so as to achieve superior chaotic mixing, thereby forming a magnetohydrodynamic barrier embedded micro mixer(160). Metal is deposited on the surface of a first substrate through thermal deposition. Then, an electrode is formed through an ultraviolet photo process. A protective layer is formed on a surface of the first substrate. A micro channel wall is formed on the protective layer through a photo process. An aluminum film is formed on the micro channel through a sputtering process. After coating photosensitive material on a second substrate, a space for forming a barrier is formed through an ultraviolet photo process. An upper micro channel plate is formed on the second substrate.