| 摘要 |
PURPOSE: A method for fabricating a vertical probe card is provided to easily correspond to a ball-type electrode pad whose upper surface protrudes by opening a probe tip of a probe card to the outside when the probe tip contacts the electrode pad. CONSTITUTION: A through hole connected to a multi-layer internal circuit is formed in a printed-circuit-board(PCB) and a connection terminal is formed in a side surface of the PCB. An electrical connection pin is prepared. A space transforming unit(S8) is formed. Upper and lower reinforcing plates can be coupled to each other. A main part made of a micro tube having an inner hole is prepared. A passivation layer is formed on the main part. The lower portion of the main part is wet-etched so that the lower portion is etched to form a tilted surface. An insertion material is filled in the main part. A passivation pattern is formed in the lower portion. The main part is wet-etched to form an elastic part having a plurality of cut parts separated from one another. The insertion material is removed to form the probe tip including a contact terminal in the lower part of the elastic part. The probe tip is attached to the lower side of the space transforming unit(S12). The electrical connection pin is inserted into the through hole. The space transforming unit is located under the PCB. The upper and lower reinforcing plates are located on and under the PCB and are coupled by a bolt(S16).
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