| 摘要 |
PURPOSE: An arc chamber of an ion implanting equipment is provided to be capable of easily and stably assembling between a clamp and a filament by using the first and second fixing groove. CONSTITUTION: A cathode(100) is installed on the inner surface of an arc chamber. A filament(200) is installed at the inner portion of the cathode(100), wherein the filament(200) includes a lead part(210) having a polygon type cross-sectional shape. The first fixing groove(311) having the first shape corresponding to the cross-sectional shape of the lead part(210), is formed on one side of a clamp(300). The second fixing groove(321) having the second shape corresponding to the cross-sectional shape of the lead part(210), is formed on one side of a fixing part(320). The filament(200) is fixed at the clamp(300) by using the first and second fixing groove(311,321).
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